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  • 简介:Correctextractionoftheultra-large-scaleintegrated(ULSI)interconnectcomponentsathightfrequenciesisveryimportantforevaluatingelectricalperformancesofhigh-speedULSIcircuits.Inthispaper,theextractionoftheinterconnectresistanceathighfrequenciesisderivedfromtheOhm′slawandverifiedbythesoftwareFastHenry.Theresultsarealsocomparedwiththoseofanotherresistanceformulaoriginatedfromtheeffectiveareaofthecurrentflowing.Theapplicabilityofthesetwoformulaeisdiscussed.Theinfluenceoftheinterconnectgeometryontheresistanceathighfrequenciesisstudied.Thecomputationindicatesthattheeffectoffrequencyontheresistanceisweakwhentheskindepthislargerthanhalfoftheshortsideoftherectangularinterconnectcrosssection.Withfurtherincreaseoffrequency,theresistanceincreasesobviously.Resultsimplythatconductorwithasquarecrosssectionexhibitsthelargestresistanceforrectangularconductorsofconstantcrosssectionarea.

  • 标签: 电阻连接 高频率 ULSI 高速电路
  • 简介:本文阐述了ULSI硅衬底片清洗的重要性,介绍了目前世界上采用的各种清洗方法(湿法、干法、超声、激光等)的概况,并通过理论分析及清洗实验研究找出适用于工业规模应用的硅片清洗液和清洗技术.

  • 标签: ULSI 衬底单晶片 清洗方法 表面活性剂 兆声清洗