简介:Correctextractionoftheultra-large-scaleintegrated(ULSI)interconnectcomponentsathightfrequenciesisveryimportantforevaluatingelectricalperformancesofhigh-speedULSIcircuits.Inthispaper,theextractionoftheinterconnectresistanceathighfrequenciesisderivedfromtheOhm′slawandverifiedbythesoftwareFastHenry.Theresultsarealsocomparedwiththoseofanotherresistanceformulaoriginatedfromtheeffectiveareaofthecurrentflowing.Theapplicabilityofthesetwoformulaeisdiscussed.Theinfluenceoftheinterconnectgeometryontheresistanceathighfrequenciesisstudied.Thecomputationindicatesthattheeffectoffrequencyontheresistanceisweakwhentheskindepthislargerthanhalfoftheshortsideoftherectangularinterconnectcrosssection.Withfurtherincreaseoffrequency,theresistanceincreasesobviously.Resultsimplythatconductorwithasquarecrosssectionexhibitsthelargestresistanceforrectangularconductorsofconstantcrosssectionarea.