FourkindsofY2O3stabilizedZrO2(YSZ)thinfilmswithdifferentY2O3contents(from0to12mol%)aredepositedonBK7glasssubstratesbyelectron-beamevaporationmethod.TheeffectsofdifferentY2O3dopantcontentsonresidualstress,structure,andopticalpropertiesofZrO2thinfilmsareinvestigated.TheresultsshowthatresidualstressinYSZthinfilmsvariesfromtensiletocompressivewiththeincreaseofY2O3molarcontent.TheadditionofY2O3isbeneficialtothecrystallizationofYSZthinfilmandtransformationfromamorphoustohightemperaturephase,andtherefractiveindexdecreaseswiththeincreaseofY2O3molarcontent.Moreover,thevariationsofresidualstressandtheshiftsofrefractiveindexcorrespondtotheevolutionofstructuresinducedbytheadditionofY2O3.
