Effects of Ion Temperature on Collisionless and Collisional RF Sheath

(整期优先)网络出版时间:2006-05-15
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Anumericaltwo-fluidsimulationofthenon-ionizedradiofrequency(rf)sheathmodel,hasbeencarriedout.Thismodelis'global'andthusapplicabletothesheath,pre-sheathandplasmaregions,Inthemodelallvariablesintheionforcebalanceequation,includingtheelectricalforce,ionpressureandneutralparticlefriction,areconsidered.Themodelissolvedthroughafinitedifferenceschemeandsheathcharacteristicsareobtained.Theeffectsoftheiontemperatureonboththecollisionlessandcollisionalsheathcharacteristicsarediscussed.Thenitisconcludedthat1)themodelisinagoodagreementwithBohmTheorem;2)theiontemperaturehassignificanteffectsontherfsheathcharacteristics.Theeffectsarefarmoresignificantonacollisionalrfsheaththanonacollisionlesssheath.