摘要
Ahybridmodelisusedtosimulatethecharacteristicsofacollisionalsheathinacapacitivelycoupledplasma(CCP)drivenbyadualfrequencysourceincludingaRFandapulsedcurrentsourceappliedtothesameelectrode.Thehybridmodelincludesafluidmodelusedtosimulatethecharacteristicsofthecollisionalsheath,andaMonte-Carlo(MC)methodtoobtainbothionenergyandionangulardistributions(IEDsandIADs)impingingonthesubstrate.Theeffectsofthelowfrequencyofthepulsedsourceandthegaspressureonthecharacteristicsofthesheath,aswellastheIEDsandIADs,arestudied.Theresultsshowthattheratioofpulse/RFfrequencyandthegaspressurearecrucialforthecharacteristicsofthesheathandtheIEDs.TheIADsaresignificantlymoresensitivetothegaspressure.
出版日期
2011年05月15日(中国期刊网平台首次上网日期,不代表论文的发表时间)