摘要
Anumericaltwo-fluidsimulationofthenon-ionizedradiofrequency(rf)sheathmodel,hasbeencarriedout.Thismodelis'global'andthusapplicabletothesheath,pre-sheathandplasmaregions,Inthemodelallvariablesintheionforcebalanceequation,includingtheelectricalforce,ionpressureandneutralparticlefriction,areconsidered.Themodelissolvedthroughafinitedifferenceschemeandsheathcharacteristicsareobtained.Theeffectsoftheiontemperatureonboththecollisionlessandcollisionalsheathcharacteristicsarediscussed.Thenitisconcludedthat1)themodelisinagoodagreementwithBohmTheorem;2)theiontemperaturehassignificanteffectsontherfsheathcharacteristics.Theeffectsarefarmoresignificantonacollisionalrfsheaththanonacollisionlesssheath.
出版日期
2006年05月15日（中国期刊网平台首次上网日期，不代表论文的发表时间）
