摘要
Weexperimentallydemonstratehighopticalqualityfactorsilicamicrodiskresonatorsonasiliconchipwithlargewedgeanglesbyreactiveionetching.For2-μm-thickmicroresonators,wehaveachievedwedgeanglesof59°,63°,70°,and79°withopticalqualityfactorsof2.4×10~7,8.1×10~6,5.9×10~6,and7.4×10~6,respectively,from～80μmdiametermicroresonatorsinthe1550nmwavelengthband.Also,for1-μm-thickmicroresonators,wehaveobtainedanopticalqualityfactorof7.3×10~6withawedgeangleof74°.
出版日期
2015年05月15日（中国期刊网平台首次上网日期，不代表论文的发表时间）
