STUDY OF SURFACE RESISTIVITY MODIFICATION IN Al2O3 CERAMIC IMPLANTED BY Fe2+

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摘要 Theimplantedionrange,thedepthprofileandthefilmsttuctureoftheimplantedlayerwerestudied;thecarrierconcentrationandthemobilityweremeasured;theconductivitymechanismofthefilmimplantedFeintoAl2O3ceramicwasdiscussed.TheconclusionisthattheimplantedFe2+ionsmoveintoAl2O3latticeandreplaceAl3+toformsubs-titutionimpuritiessothattheionimplantedlat-tice,ascomparedwiththeoriginalone,presentsaneffectivenegativechargewhichformsanegativechargecenter.Avacancyisboundarroundit,andanacceptorisintroducedintheforbiddenband.
机构地区 不详
出版日期 1991年02月12日(中国期刊网平台首次上网日期,不代表论文的发表时间)
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