摘要
Thebehaviorofargonplasmadrivenbynanosecondpulsedplasmainalow-pressureplasmareactorisinvestigatedusingaglobalmodel,andtheresultsarecomparedwiththeexperimentalmeasurements.ThetimeevolutionofplasmadensityandtheelectronenergyprobabilityfunctionarecalculatedbysolvingtheenergybalanceandBoltzmannequations.Duringandshortlyafterthedischargepulse,theelectronenergyprobabilityfunctioncanberepresentedbyabi-Maxwelliandistribution,indicatingtwoenergygroupsofelectrons.Accordingtotheeffectiveelectrontemperaturecalculation,wefindthattherearemorehigh-energyelectronsthatplayanimportantroleintheexcitationandionizationprocessesthanlow-energyelectrons.Theeffectiveelectrontemperatureisalsomeasuredviaopticalemissionspectroscopytoevaluatethesimulationmodel.Inthecomparison,thesimulationresultsarefoundtobeinagreementwiththemeasurements.Furthermore,variationsoftheeffectiveelectrontemperaturearepresentedversusotherdischargeparameters,suchaspulsewidthtime,pulserisetimeandgaspressure.
出版日期
2012年01月11日（中国期刊网平台首次上网日期，不代表论文的发表时间）
