简介:MoleculardynamicssimulationsareperformedtoinvestigateCF3continuouslybom-bardingtheamorphoussiliconsurfacewithenergiesof10eV,50eV,100eVand150eVatnormalincidenceandroomtemperature.TheimprovedTersoff-Brennerpotentialswereused.Thesimu-lationresultsshowthatthesteady-stateetchingratesareabout0.019,0.085and0.1701for50eV,100eVand150eV,respectively.Withincreasingincidentenergy,atransitionfromC-richsurfacetoF-richsurfaceisobserved.IntheregionmodifiedbyCF3,SiFandCFspeciesaredominant.
简介:Anovelapproachoftwo-steplasercrystallizationforthegrowthofpoly-Sithinfilmonglasssubstrateisinvestigated.Usingthisapproach,wefabricatedpoly-Sithinfilmtransistorswithelectronmobilityof103cm^2/V·sandon/offcurrentrationof1×10^7,Theyarebetterthanthoseofthepoly-SiTFTsfabricatedbyconventionalsingle-stepexcimerlasercrystallization.Wealsoanalyzedthestructureofthelasercrysallizedpoly-Sithinfilmandcalculatedtheellipsometricspectra.Thecalculatedresultsareingoodagreementwiththemeasuredresults.
简介:TheagingbehaviorsofirradiatedtungstenbyhighenergySi3+andH+ionsaremainlyinvestigatedusinginternalfriction(IF)methodcombinedwithSEMtechnology.TheSEManalysisindicatesthatmoresevereirradiationdamageappearsinthesurfaceofsimultaneousdualSi3+H+irradiatedspecimenthanthatinthesequentialdualSi3+H+irradiatedspecimenorthesingleSi3+irradiatedspecimensbecauseofthesynergisticeffectofSiandHirradiation.TheIFbackgroundoftheirradiatedsampleisaboutoneorderofmagnitudehigherthanthatoftheunirradiatedsampleowingtotheexistenceofhighdensityfreshdislocationsinducedbySi/Hirradiation,InthesequentialdualSi3+andH+irradiatedspecimen,thehydrogenSnoek-Ke-Koster(SKK)peakassociatedwiththemovementofdislocationsdragginghydrogenatomsisobservedanditsheightdecreaseswithagingtimeatroomtemperature.AsforthesimultaneousdualSi3+H+irradiatedspecimen,however,thereisnosuchhydrogenSKKpeak.Thereasoncanbeexplainedashydrogendiffusionandpinningeffectofdislocations.
简介:MossbauerEffectofRapidlyQuenchedAl-Fe-V-Si-MmAlloysWangJianqiang(王建强),ChaoYuesheng(晁月盛),ZengMeiguang(曾梅光),ZhangBaojin(张宝金),Ch...
简介:Al-inducedlateralcrystallizationofamorphoussiliconthinfilmsbymicrowaveannealingisinvestigated.ThecrystallizedSifilmsareexaminedbyopticalmicroscopy,Ramanspectroscopy,transmissionelectronmicroscopyandtransmissionelectrondiffractionmicrography.Aftermicrowaveannealingat480℃for50min,theamorphousSiiscompletelycrystallizedwithlargegrainsofmain(111)orientation.Therateoflateralcrystallizationis0.04μm/min.Thisprocess,labeledMILC-MA,notonlylowersthetemperaturebutalsoreducesthetimeofcrystallization.ThecrystallizationmechanismduringmicrowaveannealingandtheelectricalpropertiesofpolycrystallineSithinfilmsareanalyzed.ThisMILC-MAprocesshaspotentialapplicationsinlargeareaelectronics.
简介:Thisstudyaimstoinvestigatetheeffectofthe1-stepquenchingandpartitioning(Q&P)processonthemicrostructureandtheresultingVicker’shardnessof0.3C-1.5Si-1.5Mnsteelbyusingin-situdilatometry,opticalmicroscopy(OM),scanningelectronmicroscopy(SEM),X-raydiffractometry(XRD),andVicker’shardnessmeasurement.Systematicanalysesindicatethatthemicrostructureofthespecimensquenchedandpartitionedat150℃,200℃,250℃,and300℃mainlycompriseslathmartensiteandretainedaustenite.Thedilatometrycurveofthespecimenpartitionedat150℃ispresumablyascribedtotheformationofisothermalmartensite.Intheearlystagesofpartitioningat200℃,thenearlyunchangeddilatationcurveiscloselyrelatedtothesynergisticeffectofisothermalmartensiteformationandtransitionalepsiloncarbideprecipitation.Inthelaterstagesofpartitioningat200℃,theslightincreaseinthedilatationcurveisduetothecontinuousisothermalmartensiteformation.Withfurtherincreaseinpartitioningtemperatureto250℃,thedilatationincreasesgraduallyupto3600s,whichisrelatedtocarbonpartitioningandlowerbainiteformation.Partitioningatahighertemperatureof300℃causesarapidincreaseinthedilatationcurveduringtheinitialstages,whichsubsequentlylevelsoffuponprolongingthepartitioningtime.Thisismainlyattributedtotherapiddiffusionofcarbonfromathermalmartensitetoretainedausteniteandcontinuousformationoflowerbainite.
简介:Hybridoctagonal-ringmicrolasersareinvestigatedforrealizingastableoutputfromasiliconwaveguidebasedonatwo-dimensionalsimulation.Theinnerradiusoftheringisoptimizedtoachievesingle-modeandlow-thresholdoperation.Usingthedivinylsiloxane-benzocyclobutene(DVS-BCB)bondingtechnique,ahybridAlGaInAs/Sioctagonal-ringmicrolaserverticallycoupledtoasiliconwaveguideisfabricatedwithasidelengthof21.6μmandaninnerradiusof15μm.Asingletransverse-modeoperationisachievedwithathresholdcurrentdensityof0.8kA∕cm~2andaside-modesuppressionratioabove30dB,andastableoutputfromthelowersiliconwaveguideisobtained.