简介：Rolesofrareearthoxide(RE2O3)additivesinmillimeter-wave(MM)sinteringofAlNwereinvestigatedfromthestandpointsofphasediagram,heatingcharacteristicsofrareearthoxides,andmorphologyofintergranularoxidephase.Inthemillimeter-wavesinteringofAlN,densificationtemperaturedecreasedwiththedecreaseoftheionicradiusofrareearthionandwascloselyrelatedwiththeeutectictemperatureintheRE2O3-Al2O3binarysystem.Thelowestdensificationtemperatureinthemillimeter-wavesinteringofAlNwithYb2O3additivewasattributedtothelargestheatingrateofYb2O3·Al2O3binaryoxideundermillimeter-waveradiation.Furthermore,thelowestdensificationtemperaturecouldbeattainedwhileselectingtheYb2O3contentsoastoformtheintergranularphasewiththeeutecticcompositionintheYb2O3-Al2O3binarysystem.TheresultshowedgoodagreementwiththeabovementionedduringthesinteringofSi3N4withYb2O3-Al2O3additive.FromTEMobservation,itwasverifiedthatfilm-likeintergranularoxidephaseformedundermillimeter-waveradiationwasfavorableforattaininghighthermalconductivityintheYb2O3addedAlNs.