简介：Weexperimentallydemonstratehighopticalqualityfactorsilicamicrodiskresonatorsonasiliconchipwithlargewedgeanglesbyreactiveionetching.For2-μm-thickmicroresonators,wehaveachievedwedgeanglesof59°,63°,70°,and79°withopticalqualityfactorsof2.4×10~7,8.1×10~6,5.9×10~6,and7.4×10~6,respectively,from～80μmdiametermicroresonatorsinthe1550nmwavelengthband.Also,for1-μm-thickmicroresonators,wehaveobtainedanopticalqualityfactorof7.3×10~6withawedgeangleof74°.
客服QQ：30444492琼网文【2021】1550-113号
增值电信业务经营许可证：琼B2-20210322
出版物经营许可证：新出发龙华出字第(2021)009号
广播电视节目制作经营许可证：(琼)字第00779号
版权所有 ©2002-2024 期刊网(www.qikanchina.com) 琼ICP备2021005105号
