Calibrationofaccelerometerswithimpactexcitationandreferencemethod；CalibrationofSub-lO-nmFlyingHeightUsingtheBumpResponse；COMPRESSORTESTRIGFORMEMS-BASEDTURBOMACHINERY；Designandcontrolofasphericalair-bearingsystemformulti-d.o.f,ball-joint-likeactuators；Designconsiderationforsingle-pole-typewriteheads；Designofa3DCMMwithelasticallyguidedz-axisandx,yaxiswithlessthan2mmABBEoffset
