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2011年5期
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Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,A1)N Films
Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,A1)N Films
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摘要
未填写
DOI
odwkwq1ydk/983480
作者
Ving Yang;Shengsheng Zhao;Jun Gong;Xin Jiang;Chao Sun
机构地区
不详
出处
《材料科学技术学报:英文版》
2011年5期
关键词
热处理过程
残余应力
微观结构
薄膜
TI
退火温度
分类
[一般工业技术][材料科学与工程]
出版日期
2011年05月15日(中国期刊网平台首次上网日期,不代表论文的发表时间)
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来源期刊
材料科学技术学报:英文版
2011年5期
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相关关键词
热处理过程
残余应力
微观结构
薄膜
TI
退火温度
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