An ammonia gas sensor with two chambers based on U-bending microring resonator-中国期刊网

摘要 Acompactammoniagassensorwithtwogaschambersisproposedinthispaper,whosecoresensingdeviceisaU-bendingmicroringresonator.Thewaveguidesofringpartandfeedbackpartinthisresonatoraremadeofsilicononinsulator(SOI)ridgewaveguidecoveredwithZnOnanocrystalswhicharesensitivetoammoniagas.Thesensorcanmeasuretwogroupsofgassamplessimultaneously.Bycomputersimulation,weobtaintheclearsensitivitycurvesoftwogaschambersinammoniasensorwhenthegasconcentrationincreasesfrom0to4‰.Thegasconcentrationsintwochamberscanbeobtainedfromoneoutputspectrum,whichsignificantlyreducesthematerialandtimeconsumption.

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An ammonia gas sensor with two chambers based on U-bending microring resonator

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An ammonia gas sensor with two chambers based on U-bending microring resonator

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