简介：Wepresentintegrated-opticbuildingblocksandfunctionalphotonicdevicesbasedonamorphoussiliconon-insulatortechnology.Efficientdeep-etchedfiber-to-chipgratingcouplers,low-losssingle-modephotonicwirewaveguides,andcompactpowersplittersarepresented.Basedonthesub-μmphotonicwires,2×2Mach–Zehnderinterferometersandadd/dropmicroringresonators(MRRs)withlowdevicefootprintsandhighfinesseupto200wererealizedandstudied.Compactpolarizationrotatorsandsplitterswith≥10dBpolarizationextinctionratiowerefabricatedforthepolarizationmanagementon-chip.Thetuningandtrimmingcapabilitiesofthematerialplatformaredemonstratedwithefficientmicroheatersandapermanentdevicetrimmingmethod,whichenabledtherealizationofenergy-efficientphotoniccircuits.Wavelengthmultiplexersintheformofcascadedfilterbanksand4×4routersbasedonMRRswitchesarepresented.Fabricationimperfectionswereanalyzedandpermanentlycorrectedbyanaccuratelaser-trimmingmethod,thusenablingeight-channelmultiplexerswithrecordlowmetricsofsub-mWstaticpowerconsumptionand≤1°Ctemperatureoverhead.Thehighqualityofthefunctionaldevices,thehightuningefficiency,andtheexcellenttrimmingcapabilitiesdemonstratethepotentialtorealizelow-cost,denselyintegrated,andultralow-power3D-stackedphotoniccircuitsontopofCMOSmicroelectronics.