简介：OnaccountofthemultiformityofMEMSdevices,itisnecessarytointegratewithsomeopticalmeasurementtechniquesformeetingstaticanddynamicunittestrequirements.Inthispaper,anautomatedMEMStestsystemisbuiltofsomecommerciallyavailablecomponentsandinstrumentsbasedonvirtualinstrumenttechnology.Thesystemisintegratedwithstroboscopicimaging,computermicro-vision,microscopicMirauphaseshiftinginterferometry,andlaserDopplervibrometer,andisusedforthemeasurementoffull-viewin-planeandout-of-planegeometricparametersandperiodicalmotionsandsinglespotout-of-planetransientmotion.Thesystemconfigurationandmeasurementmethodsareanalyzed,andsomeapplicationsofthemeasurementofin-planeandout-of-planedimensionsandmotionsweredescribed.Themeasurementaccuracyofin-planedimensionsandout-of-planedimensionalisbetterthan0.2μmand5nmrespectively.Theresolutionofmeasuringin-planeandout-of-planemotionsisbetterthan15nmand2nmrespectively.