简介:Itisveryimportanttomeasurelocaldeformationsforanin-depthunderstandingofmechanicalpropertiesandfracturemechanismofstructuralandfunctionalmaterials.Inthispaper,differenttypesofmodelgridfabricationmethodsandmanytypesofelectronMoiremethodsusinganelectronbeamdrawingsystem,ascanningelectronmicroscopeorafocusionbeamarereported,togetherwiththeirapplicationsinthemeasurementofdeformationsoccurringinvariousengineeringsandmaterialsscienceresearch.