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1 个结果
  • 简介:Thedual-frequencycapacitivelycoupledplasma(DF-CCP)withinductiveenhancementsystemisanewlydesignedplasmareactor.Differentfromtheconventionalinductivelycoupledplasma(ICP)reactors,nowaradiofrequency(rf)powerisconnectedtoanantennaplacedoutsidethechamberwithaone-turnbarecoilplacedbetweentwoelectrodesinDF-CCP.Thispapergivesadetaileddescriptionofitsstructure.Moreover,investigationsonsomecharacteristicsofdischargesinthisapparatusweremadeviaaLangmuirprobe.

  • 标签: 感应耦合等离子体 感性 双频 等离子体反应器 氩气 电容