学科分类
/ 1
2 个结果
  • 简介:接触暴露被期望发生在常规平版印刷术,并且能是进程偏差的来源(例如缩小和模板的失真)在反应离子蚀刻并且诱导地联合的血浆蚀刻,,期间,这些偏差被离子轰炸导致。这典型地导致不希望得到的sidewall效果,例如更低的sidewall角度。这里,我们报导能有效地在平版印刷术应用最小化sidewall效果的一个新奇的挂bowlshaped平版印刷术面具。作为一个测试用例,有垂直sidewalls的标准硅碳化物支柱用这个面具被制作。面具能与紫外线平版印刷术被用于high-aspect-ratio结构的制造。

  • 标签: 光刻掩模 侧壁 结构 垂直 等离子体蚀刻 光刻技术
  • 简介:Inthepresentwork,theheattransferstudyfocusesonassessmentoftheimpactofbedtemperatureonthelocalheattransfercharacteristicbetweenafluidizedbedandverticalrifledtubes(38mm-O.D.)inacommercialcirculatingfluidizedbed(CFB)boiler.Heattransferbehaviorina1296t/hsupercriticalCFBfurnacehasbeenanalyzedforGeldartBparticlewithSautermeandiameterof0.219and0.246mm.TheheattransferexperimentswereconductedfortheactiveheattransfersurfaceintheformofmembranetubewithalongitudinalfinatthetubecrestunderthenormaloperatingconditionsofCFBboiler.AheattransferanalysisofCFBboilerwithdetailedconsiderationofthebed-to-wallheattransfercoefficientandthecontributionofheattransfermechanismsinsidefurnacechamberwereinvestigatedusingmechanisticheattransfermodelbasedonclusterrenewalapproach.ThepredictedvaluesofheattransfercoefficientarecomparedwithempiricalcorrelationforCFBunitsinlarge-scale.

  • 标签: 循环流化床(CFB)锅炉 传热特性 垂直 床温 循环流化床锅炉 纵向翅片管