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  • 简介:Wereportthefabricationofsubmicrometerpitsarray(SP-array)on6H-SiCsurfacebytheinterferenceoftwofemtosecondlaserbeams.FormationmechanismsandopticalabsorptionofSP-arrayarestudied.Therelativereflectivityandtransmissivityofwhitelightdecreaseto10%ofthevaluesofSiCcrystal,andtheopticalabsorptionisenhancedto97%.Therelativereflectivityandtransmissivityofincidentangleswithintherangeof20°-60°arekeptbelow25%.TheenhancementmechanismofopticalabsorptionoftheSP-arrayisalsodiscussed.

  • 标签: 亚微米级 光吸收 SiC 阵列 激光干涉 飞秒