摘要
5.REpolishingpowdersREpolishingpowdersoccupy14%oftotalREconsumption.Cerium-basedpolishingpowdersarewidelyusedinprecisepolishingforopticallens,LCDscreen,siliconsingle-crystalwaferandotherelectroniccomponents.Mostofpolishingpowdersareofmicrometergradecurrently.
出版日期
2009年02月12日(中国期刊网平台首次上网日期,不代表论文的发表时间)