Fabrication of Poly—Si TFT by Al—induced Lateral Crystallization at Low Temperature-中国期刊网

摘要 Usinganewlow-temperatureprocess(＜600℃),thepoly-SiTFTwasfabricatedbymetal-inducedlateralcrystallization(MILC).Anultrathinaluminumlayerwasdepositedona-Sifilmandselectivelyformedbyphotolithography.Thefilmswerethenannealedat560℃toobtainlaterallycrystallizedpoly-Sifilm,whichisusedasthechannelareaofaTFT.Thepoly-SiTFTshowedanon/offcurrentratioofhigherthan1×106atadrainvoltageof5V.TheelectricalpropertiesaremuchbetterthanTFTfabricatedbyconventionalcrystallizationat600℃.

1RAORui XUZhong-yang等. Al-induced Lateral Crystallization of Amorphous Si Thin Films by Microwave Annealing.材料科学与工程,2002-04.
2王成龙;范多旺;孙硕;张福甲;刘红忠. Low-Temperature （〈 100℃） Poly-Si Thin Film Fabrication on Glass.物理,2009-01.
3王超;邵军强;穆泽林;刘文明;倪刚. Temperature and metal composition dependence of lateral photovoltaic effect in Al-Alq3/SiO2//Si structures.光学工程,2014-04.
4QIANYongbiao;SHIWeimin;等. Silicon Film Fabrication by Liquid Phase Epitaxy at Low Temperature.物理电子学,1998-01.
5ZENGXiang－bin;XUZhong－yang;等. Poly—Si Thin Film Grown by Excimer Laser Crystallization and Its Ellipsometric Analysis.物理电子学,2000-02.
6MA Yulong;WANG Xiaomeng;LIU Wei;GONG Wei;HE Li. Effects of Annealing Process on Crystallization and Low Temperature Resistance Properties of PP-R Composites.材料科学与工程,2018-04.
7Fa-liang Luo;Fa-hai Luo;Qian Xing;Xiu-qin Zhang;Hong-qiao Jiao;Min Yao;Chun-tao Luoa;Du-jin Wang. HYDROGEN-BONDING INDUCED CHANGE OF CRYSTALLIZATION BEHAVIOR OF POLY（BUTYLENE SUCCINATE） IN ITS MIXTURES WITH BISPHENOL A.高分子化学,2013-12.
8王泽华;陆洋;林萍华;江少群. Effects of Cu, Si, Ni and rare earth elements on melting temperature and properties of Al-Si filler metals.焊接,2009-04.
9Hai-jun Wang;Hui-ping Feng;Xue-chuan Wang;Qing-chuan Du;Chao Yan. Crystallization of Poly（ethylene adipate） within γ-Phase Poly（vinylidenefluoride） Matrix.高分子化学,2015-06.
10Z.M.Jiang Q.J.Jia 等. Strong surface segregation of Sb atoms at low temperature during Si molecular beam epitaxy.核技术及应用,1998-01.

Fabrication of Poly—Si TFT by Al—induced Lateral Crystallization at Low Temperature

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Fabrication of Poly—Si TFT by Al—induced Lateral Crystallization at Low Temperature

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