摘要
Theroleofpulseparametersonnanoparticlepropertyisinvestigatedself-consistentlybasedonacoupleoffluidmodelandaerosoldynamicsmodelinacapacitivelycoupledparallel-plateacetylene(C2H2)discharge.Inthismodel,themasscontinuityequation,momentumbalanceequation,andenergybalanceequationforneutralgasaretakenintoaccount.Thus,thethermophoreticforceariseswhenagastemperaturegradientexists.Thetypicalresultsofthismodelarepositiveandnegativeiondensities,electronimpactcollisionsrates,nanoparticledensity,andchargedistributions.Thesimulationisperformedfordutyratio0.4/0.7/1.0,aswellaspulsemodulationfrequencyfrom40kHzto2.7MHzforpureC2H2dischargesatapressureof500mTorr.Wefindthatthepulseparameters,especiallythedutyratio,haveagreataffectonthedissociativeattachmentcoefficientandthenegativedensity.Moreimportantly,bydecreasingthedutyratio,nanoparticlesstarttodiffusetothewall.Undertheactionofgasflow,nanoparticledensitypeakiscreatedinfrontofthepulseelectrode,wherethegastemperatureissmaller.
出版日期
2015年07月17日（中国期刊网平台首次上网日期，不代表论文的发表时间）
