Adual-stageservosystemconsistsofaprimarycoarseactuatorforfacilitatinglargemotionandasecondarymicro-actuatorforsmallbutprecisemotiontoimprovetrackingperformance.Piezoelectricmicro-actuatormadefromleadzirconatetitanate(PZT)hasbeenapopularchoiceforthesecondarystage.However,theadvantagegainedbytheresolutionofthesecondaryPZTactuatorisreducedbyitsinherenthysteresisnonlinearity.Modelbasedhysteresiscompensationtechniquesarepreferredduetotheirsimplicityandfastresponse.Identificationandmodelingaretwosubstantialpartsinsuchmodel-basedtechniques.ThispaperpresentsarigorousanalysisandmodelingofthehysteresisofPZTmicro-actuator.ModifiedGeneralizedPrandtl-IshlinskiiandColeman-Hodgdonmodelsarestudied.Identificationofthemodelthroughnonlinearleastsquareandparticleswarmoptimizationareexaminedandcompared.Severalanalysesaredonethroughtuningofthemodelparametersandidentificationtechniques.Experimentalanalysisandsimulationresultsunderscoretheeffectivenessofthismodelingapproach.Finallyasadesignexample,adual-stagesimulationanalysisisdonetoshowtheeffectivenessofsystematicmodelingonhysteresiscompensation.
