A Nano-Cantilever Method for Crack Initiation at the Free Edge of the Cu/Si Interface in Nanoscale Components

(整期优先)网络出版时间:2016-04-14
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StraightandBentnano-cantileverspecimensarerespectivelyproposedtoinvestigatethesingle-modeandmixed-modecrackinitiationattheCu/Siinterfaceedgeinnanoscalecomponents.Withaminuteloadingapparatus,allnanoscalesamplesareinsituloadedandobserved.Numericalanalysisisemployedtoacquirethecriticalinterfacialstressdistributionsduringcrackinitiation.ThestressconcentrationregionsneartheedgeofCu/Siinterfaceinallspecimensarewithinthescaleof100nm,andthecriticalnormalandshearstresseshaveacircularrelationinnanoscalecomponents,whichrepresentsthefracturecriterionoftheinterfaceinnanoscalecomponents.